Maps for SVX3D wafer 80 annealed by Honeywell

To my best knowledge, wafer 80 has been annealed for 40 min. at 400 degrees C.

Changes in die classification after annealing:

good -> fair :  11 die ( die # 2, 15, 19, 44, 60, 82, 83, 95, 107, 122, 128 )
good -> bad :  18 ( # 3, 23, 33, 34, 50, 59, 61, 67, 99, 100, 115, 116, 117, 119, 124, 132, 133, 134 )
fair -> good :  0
fair -> bad :    10 ( # 31, 36, 51, 66, 81, 92, 106, 109, 127, 129 )
bad -> good :  1 ( # 1 )
bad -> fair :    1 ( # 74 )
No change :    93

Die quality before annealing, after annealing

Pipeline quality map before annealing, after annealing

Map of die failures before annealing, after annealing

Map of random bad cells before annealing, after annealing


Questions? E-mail to igv@lbl.gov