Maps for 6-in SVX3D wafers from lots 13 and 14

Click on letters in the "Maps" column to get various wafer maps in Postscript:
A -- standard wafer quality map
B -- map of die failure types
C -- pipeline quality map
D -- map of "random" bad pipeline cells

Lot 13
 
 Wafer # 
 Manufacturer # 
 Good die yield (%) 
 Good+fair yield (%) 
    Maps    
187*
21316-13-12
18.7
52.2
A, B, C, D
188*
21316-13-07
32.8
56.0
A, B, C, D
189*
21316-13-04
25.4
47.8
A, B, C, D
190*
21316-13-01
9.0
29.9
A, B, C, D
229
21316-13-13
13.4
34.3
A, B, C, D
230
21316-13-20
4.5
11.2
A, B, C, D

The average yield of good dice in the above sample is 17.3 %. The combined yield of good and fair dice is 38.6 %.

Lot 14
 
 Wafer # 
 Manufacturer # 
 Good die yield (%) 
 Good+fair yield (%) 
    Maps    
191*
21316-14-11
43.3
52.2
A, B, C, D
192*
21316-14-04
47.0
65.7
A, B, C, D
193*
21316-14-20
47.8
63.4
A, B, C, D
194*
21316-14-16
35.8
59.0
A, B, C, D
195*
21316-14-07
52.2
66.4
A, B, C, D
196
21316-14-01
13.4
27.6
A, B, C, D
197
21316-14-05
36.6
60.4
A, B, C, D
198
21316-14-15
53.7
69.4
A, B, C, D
199
21316-14-17
34.3
59.0
A, B, C, D
200
21316-14-18
32.8
49.3
A, B, C, D
201
21316-14-08
29.9
49.3
A, B, C, D
202
21316-14-10
50.0
64.2
A, B, C, D
203
21316-14-14
47.0
65.7
A, B, C, D
204
21316-14-03
47.8
62.7
A, B, C, D
205
21316-14-02
47.8
63.4
A, B, C, D
215
21316-14-06
44.8
64.9
A, B, C, D
226
21316-14-12
47.8
62.7
A, B, C, D
227
21316-14-13
40.3
53.7
A, B, C, D
228
21316-14-19
49.3
62.7
A, B, C, D

Total number of wafers in lot 14 is 19. The average yield of good dice for this lot is 42.2 %. The combined yield of good and fair dice is 59.0 %.

* -- These wafers were probed before backgrinding and backplating.


Questions? E-mail to igv@lbl.gov